The purpose of our heating service is to enhance the thermal performance of key equipment and manufacturing processes of our semiconductor customers, strengthen the research and development of the domestic semiconductor industry chain, reduce reliance on external supply chains, especially in the supply of key materials, equipment and technologies, and promote the development of the domestic semiconductor industry.
The heating items are as below:
1.Mica heating plate:
2.Semiconductor heating rod:It is applied to various chamber heating, various wafer processing, and various gas transportation heating
3.Semiconductor heating ring: It is applied to high radio frequency environment.
